Publication:

Aqueous chemical solution deposition of LuFeO3 thin high-k films

Date

2012
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dc.contributor.authorGielis, Sven
dc.contributor.authorPeys, Nick
dc.contributor.authorDewulf, D.
dc.contributor.authorPavlovic, N.
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-20T11:11:50Z
dc.date.available2021-10-20T11:11:50Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20721
dc.source.conference514th WE-Heraeus Seminar
dc.source.conferencedate21/08/2012
dc.source.conferencelocationBad Honnef Germany
dc.title

Aqueous chemical solution deposition of LuFeO3 thin high-k films

dc.typeOral presentation
dspace.entity.typePublication
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