Publication:
Internal stresses in aluminium interconnects
Date
| dc.contributor.author | Saerens, Annelies | |
| dc.contributor.author | Van Houtte, P. | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-14T11:36:27Z | |
| dc.date.available | 2021-10-14T11:36:27Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3789 | |
| dc.source.conference | 5th European Conference on Residual Stress - ECRS5; 28-30 September 1999; Delft, The Netherlands. | |
| dc.source.conferencelocation | ||
| dc.title | Internal stresses in aluminium interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |