Publication:
Enabling 3D NAND Trench Cells for Scaled Flash Memories
| dc.contributor.author | Rachidi, Sana | |
| dc.contributor.author | Ramesh, Siva | |
| dc.contributor.author | Breuil, Laurent | |
| dc.contributor.author | Tao, Zheng | |
| dc.contributor.author | Verreck, Devin | |
| dc.contributor.author | Donadio, Gabriele Luca | |
| dc.contributor.author | Arreghini, Antonio | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Rachidi, Sana | |
| dc.contributor.imecauthor | Ramesh, Siva | |
| dc.contributor.imecauthor | Breuil, Laurent | |
| dc.contributor.imecauthor | Tao, Zheng | |
| dc.contributor.imecauthor | Verreck, Devin | |
| dc.contributor.imecauthor | Donadio, Gabriele Luca | |
| dc.contributor.imecauthor | Arreghini, Antonio | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Rosmeulen, Maarten | |
| dc.contributor.orcidimec | Rachidi, Sana::0000-0001-8581-8597 | |
| dc.contributor.orcidimec | Ramesh, Siva::0000-0002-8473-7258 | |
| dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
| dc.contributor.orcidimec | Verreck, Devin::0000-0002-3833-5880 | |
| dc.contributor.orcidimec | Donadio, Gabriele Luca::0000-0003-1435-3897 | |
| dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
| dc.date.accessioned | 2024-04-10T08:55:10Z | |
| dc.date.available | 2023-07-28T17:39:46Z | |
| dc.date.available | 2024-04-10T08:55:10Z | |
| dc.date.issued | 2023 | |
| dc.description.wosFundingText | This work was supported by IMEC's Industrial Affiliation Program on Storage Memory devices. | |
| dc.identifier.doi | 10.1109/IMW56887.2023.10145992 | |
| dc.identifier.eisbn | 978-1-6654-7459-7 | |
| dc.identifier.issn | 2330-7978 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42224 | |
| dc.publisher | IEEE | |
| dc.source.beginpage | 121 | |
| dc.source.conference | 15th IEEE International Memory Workshop (IMW) | |
| dc.source.conferencedate | MAY 21-24, 2023 | |
| dc.source.conferencelocation | Monterey | |
| dc.source.endpage | 124 | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 4 | |
| dc.title | Enabling 3D NAND Trench Cells for Scaled Flash Memories | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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