Publication:
Thermal ALD for industrial Si solar cells: advanced cleaning
Date
| dc.contributor.author | Vermang, Bart | |
| dc.contributor.author | Bearda, Twan | |
| dc.contributor.author | Rothschild, Aude | |
| dc.contributor.author | John, Joachim | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.imecauthor | Vermang, Bart | |
| dc.contributor.imecauthor | John, Joachim | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.contributor.orcidimec | Vermang, Bart::0000-0003-2669-2087 | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-18T23:51:48Z | |
| dc.date.available | 2021-10-18T23:51:48Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18282 | |
| dc.source.conference | Baltic ALD and GerALD | |
| dc.source.conferencedate | 16/09/2010 | |
| dc.source.conferencelocation | Hamburg Germany | |
| dc.title | Thermal ALD for industrial Si solar cells: advanced cleaning | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |