Publication:

Low-k reliability

Date

2008
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dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorTokei, Zsolt
dc.date.accessioned2021-10-17T11:19:34Z
dc.date.available2021-10-17T11:19:34Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14565
dc.source.conference19th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis
dc.source.conferencedate29/09/2008
dc.source.conferencelocationMaastricht The Netherlands
dc.title

Low-k reliability

dc.typeOral presentation
dspace.entity.typePublication
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