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First demonstration of sub-12 nm gate last IGZO-TFTs with oxygen tunnel architecture for front gate devices
Publication:
First demonstration of sub-12 nm gate last IGZO-TFTs with oxygen tunnel architecture for front gate devices
Date
2021
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Subhechha, Subhali
;
Rassoul, Nouredine
;
Belmonte, Attilio
;
Delhougne, Romain
;
Donadio, Gabriele Luca
;
Banerjee, Kaustuv
;
Dekkers, Harold
;
van Setten, Michiel
;
Mao, Ming
;
Puliyalil, Harinarayanan
;
Kundu, Shreya
;
Pak, Murat
;
Teugels, Lieve
;
Tsvetanova, Diana
;
Bazzazian, Nina
;
Klijs, Lars
;
Vaisman Chasin, Adrian
;
Heijlen, Jeroen
;
Kar, Gouri Sankar
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2267
since deposited on 2021-10-31
Acq. date: 2025-10-23
Citations
Metrics
Views
2267
since deposited on 2021-10-31
Acq. date: 2025-10-23
Citations