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Conference contributions
Low-k organic spin-on materials in a non-etchback interconnect strategy
Publication:
Low-k organic spin-on materials in a non-etchback interconnect strategy
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Date
1996
Proceedings Paper
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1618.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Waeterloos, Joost
;
Meynen, Herman
;
Coenegrachts, Bart
;
Grillaert, Joost
;
Van den hove, Luc
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1960
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-11
Citations
Metrics
Views
1960
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-11
Citations