Publication:

Alternative high-k dielectrics for semiconductor applications

Date

2008
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Author(s)

Van Elshocht, Sven  
;
Adelmann, Christoph  
;
Clima, Sergiu  
;
Pourtois, Geoffrey  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Franquet, Alexis  
;
Lehnen, Peer
;
Meersschaut, Johan  
;
Menou, Nicolas
;
Popovici, Mihaela Ioana  
;
Richard, Olivier  
;
Schram, Tom  
;
Wang, Xin Peng
;
Hardy, An  
;
Dewulf, Daan
;
van Bael, M.K.
;
Blomberg, T.
;
Pieereux, D.
;
Swerts, J.
;
Maes, J.W.
;
Wouters, Dirk
;
De Gendt, Stefan  
;
Kittl, Jorge

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