Publication:

Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 mm

Date

1996
Journal article
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dc.contributor.authorStiens, Johan
dc.contributor.authorRanson, Willy
dc.contributor.authorCottam, Ronald
dc.contributor.authorDe Tandt, Cathleen
dc.contributor.authorVounckx, Roger
dc.contributor.authorKotov, V.
dc.contributor.authorShkerdin, G.
dc.contributor.authorDhoedt, Bart
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorStiens, Johan
dc.contributor.imecauthorVounckx, Roger
dc.contributor.imecauthorDhoedt, Bart
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecDhoedt, Bart::0000-0002-7271-7479
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-09-29T15:28:44Z
dc.date.available2021-09-29T15:28:44Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1508
dc.source.beginpage3453
dc.source.endpage3455
dc.source.issue23
dc.source.journalApplied Physics Letters
dc.source.volume69
dc.title

Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 mm

dc.typeJournal article
dspace.entity.typePublication
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