Efficient Resonance Management in Ultrahigh-Q 1D Photonic Crystal Nanocavities Fabricated on 300 mm SOI CMOS Platform

dc.contributor.author	Xie, Weiqiang
dc.contributor.author	Verheyen, Peter
dc.contributor.author	Pantouvaki, Marianna
dc.contributor.author	Van Campenhout, Joris
dc.contributor.author	Van Thourhout, Dries
dc.contributor.imecauthor	Verheyen, Peter
dc.contributor.imecauthor	Pantouvaki, Marianna
dc.contributor.imecauthor	Van Campenhout, Joris
dc.contributor.imecauthor	Van Thourhout, Dries
dc.contributor.orcidimec	Verheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimec	Van Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimec	Van Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned	2022-03-02T13:59:11Z
dc.date.available	2022-03-02T13:59:11Z
dc.date.issued	2021
dc.identifier.doi	10.1002/lpor.202000317
dc.identifier.issn	1863-8880
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/39233
dc.publisher	WILEY-V C H VERLAG GMBH
dc.source.beginpage	2000317
dc.source.issue	2
dc.source.journal	LASER & PHOTONICS REVIEWS
dc.source.numberofpages	9
dc.source.volume	15
dc.subject.keywords	DROP FILTER
dc.subject.keywords	COMPACT
dc.title	Efficient Resonance Management in Ultrahigh-Q 1D Photonic Crystal Nanocavities Fabricated on 300 mm SOI CMOS Platform
dc.type	Journal article
dspace.entity.type	Publication
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