Publication:
Hot hole induced degradation of oxynitrides
Date
| dc.contributor.author | Sii, H. K. | |
| dc.contributor.author | Zhang, Jenny | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.date.accessioned | 2021-09-30T09:31:31Z | |
| dc.date.available | 2021-09-30T09:31:31Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2135 | |
| dc.source.conference | SISC-Conference; December 1997; Charleston, South-Carolina, USA. | |
| dc.source.conferencelocation | ||
| dc.title | Hot hole induced degradation of oxynitrides | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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