Publication:
ALD applications in advanced CMOS scaling
Date
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-22T01:57:28Z | |
| dc.date.available | 2021-10-22T01:57:28Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23932 | |
| dc.source.beginpage | na | |
| dc.source.conference | Baltic ALD Conference, | |
| dc.source.conferencedate | 12/05/2014 | |
| dc.source.conferencelocation | Helsinki Finland | |
| dc.title | ALD applications in advanced CMOS scaling | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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