Publication:
Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Zyulkov, Ivan | |
| dc.contributor.author | Herregods, Sebastiaan | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Zyulkov, Ivan | |
| dc.contributor.imecauthor | Herregods, Sebastiaan | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-25T16:34:37Z | |
| dc.date.available | 2021-10-25T16:34:37Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30147 | |
| dc.identifier.url | http://www.dry-process.org/2018/plenary.html | |
| dc.source.conference | 40th International Symposium on Dry Process - DPS 2018 | |
| dc.source.conferencedate | 11/11/2018 | |
| dc.source.conferencelocation | Nagoya Japan | |
| dc.title | Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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