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Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance

 
dc.contributor.authorDey, Bappaditya
dc.contributor.authorAnh Tuan Ngo
dc.contributor.authorSacchi, Sara
dc.contributor.authorBlanco, Victor
dc.contributor.authorLeray, Philippe
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorDey, Bappaditya
dc.contributor.imecauthorSacchi, Sara
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimecSacchi, Sara::0000-0001-7486-6614
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2025-04-13T04:30:51Z
dc.date.available2025-04-13T04:30:51Z
dc.date.issued2025
dc.identifier.doi10.1007/978-3-031-74640-6_36
dc.identifier.eisbn978-3-031-74640-6
dc.identifier.isbn978-3-031-74639-0
dc.identifier.issn1865-0929
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45526
dc.publisherSPRINGER INTERNATIONAL PUBLISHING AG
dc.source.beginpage435
dc.source.conference8th European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases
dc.source.conferencedateSEP 18-22, 2023
dc.source.conferencelocationTurin
dc.source.endpage453
dc.source.numberofpages19
dc.source.volume2136
dc.title

Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance

dc.typeProceedings paper
dspace.entity.typePublication
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