Publication:

Operation of a Cameca IMS-4f at reduced extraction energies

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGeenen, Luc
dc.contributor.authorElst, Kathy
dc.contributor.authorDe Bisschop, Peter
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.accessioned2021-09-29T12:51:01Z
dc.date.available2021-09-29T12:51:01Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/420
dc.source.beginpage282
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
dc.source.conferencedate7/11/1993
dc.source.conferencelocationYokohama Japan
dc.source.endpage285
dc.title

Operation of a Cameca IMS-4f at reduced extraction energies

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
415.pdf
Size:
169.27 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions