Publication:

Relation between Raman frequency and stress in Si for surface and cross-section experiments in microelectronics components

Date

Loading...
Thumbnail Image

Journal

Abstract

Description

Metrics

Views

1851 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2025-12-15

Citations

Metrics

Views

1851 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2025-12-15

Citations