Publication:

A capacitive humidity sensor using a positive photosensitive polymer

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorPham, Nga
dc.contributor.authorCherman, Vladimir
dc.contributor.authorDuval, Fabrice
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorJansen, Roelof
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-18T20:17:50Z
dc.date.available2021-10-18T20:17:50Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17803
dc.source.beginpage60
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede The Netherlands
dc.source.endpage63
dc.title

A capacitive humidity sensor using a positive photosensitive polymer

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions