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Conference contributions
Effect of Cl in gate oxidation
Publication:
Effect of Cl in gate oxidation
Date
1997
Proceedings Paper
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1995.pdf
532.94 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Paul
;
McGeary, M. J.
;
Schaekers, Marc
;
Sprey, Hessel
;
Vermeire, Bert
;
Depas, Michel
;
Meuris, Marc
;
Heyns, Marc
Journal
Abstract
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Views
1988
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1988
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations