Publication:
Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry
Date
| dc.contributor.author | Monaghan, M. L. | |
| dc.contributor.author | Nigam, Tanya | |
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Urbach, H. P. | |
| dc.contributor.author | De Bokx, P. K. | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-14T13:24:27Z | |
| dc.date.available | 2021-10-14T13:24:27Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4593 | |
| dc.source.beginpage | 197 | |
| dc.source.endpage | 202 | |
| dc.source.issue | 2 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 359 | |
| dc.title | Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |