Publication:
CoSi2 formation from CoxNi1-x/Ti system
Date
| dc.contributor.author | Chamirian, Oxana | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Demeurisse, Caroline | |
| dc.contributor.author | Guérault, H. | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Demeurisse, Caroline | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T21:13:05Z | |
| dc.date.available | 2021-10-14T21:13:05Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6090 | |
| dc.source.beginpage | 173 | |
| dc.source.endpage | 180 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 64 | |
| dc.title | CoSi2 formation from CoxNi1-x/Ti system | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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