Publication:

First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devices

Date

2018
Proceedings Paper
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Author(s)

Delhougne, Romain  
;
Arreghini, Antonio  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Vecchio, Emma  
;
Zhang, Liping  
;
Pak, Murat  
;
Nyns, Laura  
;
Raymaekers, Tom
;
Jossart, Nico  
;
Breuil, Laurent  
;
Vadakupudhu Palayam, Senthil  
;
Tan, ChiLim
;
Van den Bosch, Geert  
;
Furnemont, Arnaud  

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