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Publication:

First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers

Date

2020
Proceedings Paper
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Author(s)

Subramanian, Sujith  
;
Hosseini, Maryam  
;
Chiarella, Thomas  
;
Sarkar, Satadru  
;
Schuddinck, Pieter  
;
Chan, BT  
;
Radisic, Dunja  
;
Mannaert, Geert  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Sebaai, Farid  
;
Peter, Antony  
;
Hopf, Toby  
;
Morin, Pierre  
;
Wang, Shouhua  
;
Devriendt, Katia  
;
Batuk, Dmitry  
;
Martinez Alanis, Gerardo Tadeo  
;
Veloso, Anabela  
;
Dentoni Litta, Eugenio  
;
Baudot, Sylvain  
;
Siew, Yong Kong  
;
Zhou, X.
;
Briggs, Basoene  
;
Capogreco, Elena  
;
Hung, Joey  
;
Koret, R.
;
Spessot, Alessio  
;
Ryckaert, Julien  
;
Demuynck, Steven  
;
Horiguchi, Naoto  
;
Boemmels, Juergen  

Journal

na

Abstract

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