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First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
Publication:
First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
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Date
2020
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Subramanian, Sujith
;
Hosseini, Maryam
;
Chiarella, Thomas
;
Sarkar, Satadru
;
Schuddinck, Pieter
;
Chan, BT
;
Radisic, Dunja
;
Mannaert, Geert
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Sebaai, Farid
;
Peter, Antony
;
Hopf, Toby
;
Morin, Pierre
;
Wang, Shouhua
;
Devriendt, Katia
;
Batuk, Dmitry
;
Martinez Alanis, Gerardo Tadeo
;
Veloso, Anabela
;
Dentoni Litta, Eugenio
;
Baudot, Sylvain
;
Siew, Yong Kong
;
Zhou, X.
;
Briggs, Basoene
;
Capogreco, Elena
;
Hung, Joey
;
Koret, R.
;
Spessot, Alessio
;
Ryckaert, Julien
;
Demuynck, Steven
;
Horiguchi, Naoto
;
Boemmels, Juergen
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na
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Views
1980
since deposited on 2021-11-02
8
last month
2
last week
Acq. date: 2025-12-12
Citations