Publication:
Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
Date
| dc.contributor.author | Vos, Ingrid | |
| dc.contributor.author | Hellin, David | |
| dc.contributor.author | Vertommen, Johan | |
| dc.contributor.author | Boullart, Werner | |
| dc.contributor.imecauthor | Vos, Ingrid | |
| dc.contributor.imecauthor | Hellin, David | |
| dc.contributor.imecauthor | Boullart, Werner | |
| dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
| dc.date.accessioned | 2021-10-19T21:32:03Z | |
| dc.date.available | 2021-10-19T21:32:03Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20116 | |
| dc.source.beginpage | 2042 | |
| dc.source.conference | ECS Fall Meeting | |
| dc.source.conferencedate | 9/10/2011 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |