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Advanced high-k materials and electrical analysis for memories: the role of SiO2-high-k dielectric intermixing
Publication:
Advanced high-k materials and electrical analysis for memories: the role of SiO2-high-k dielectric intermixing
Date
2009
Proceedings Paper
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19740.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Morassi, L.
;
Larcher, L.
;
Pantisano, Luigi
;
Padovani, A.
;
Degraeve, Robin
;
Zahid, Mohammed
;
O'Sullivan, Barry
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1898
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1898
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations