Publication:
Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistors
Date
| dc.contributor.author | Maes, D. | |
| dc.contributor.author | Van Steenkiste, Filip | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Gumbrecht, W. | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.date.accessioned | 2021-10-14T11:29:52Z | |
| dc.date.available | 2021-10-14T11:29:52Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3643 | |
| dc.source.conference | 1st European Symposium on Plasma Process Induced Damage (ESPID'1); 25-26 November 1999; Toulouse, France. | |
| dc.source.conferencelocation | ||
| dc.title | Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistors | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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