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Conference contributions
Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM
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Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Spampinato, Valentina
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
van der Heide, Paul
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1933
since deposited on 2021-10-27
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Acq. date: 2025-12-15
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Metrics
Views
1933
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-15
Citations