Publication:
Development of wet resist strip strategies based on the identification of structural changes in the resist after arsenic ion implantation
Date
| dc.contributor.author | Tsvetanova, Diana | |
| dc.contributor.imecauthor | Tsvetanova, Diana | |
| dc.contributor.thesisadvisor | Heyns, Marc | |
| dc.contributor.thesisadvisor | Parac-Vogt, Tatiana N. | |
| dc.date.accessioned | 2021-10-20T17:16:06Z | |
| dc.date.available | 2021-10-20T17:16:06Z | |
| dc.date.issued | 2012-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21649 | |
| dc.title | Development of wet resist strip strategies based on the identification of structural changes in the resist after arsenic ion implantation | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
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