Publication:

TiN scanning probes for electrical profiling of nanoelectronics device structures

Date

2011
Presentation
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCelano, Umberto
dc.contributor.authorMoussa, Alain
dc.contributor.authorArstila, Kai
dc.contributor.authorEyben, Pierre
dc.contributor.authorMajeed, Bivragh
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorWerner, Thilo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.accessioned2021-10-19T14:08:48Z
dc.date.available2021-10-19T14:08:48Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19041
dc.source.conferenceMicro- and Nanoengineering Conference - MNE
dc.source.conferencedate19/09/2011
dc.source.conferencelocationBerlin Germany
dc.title

TiN scanning probes for electrical profiling of nanoelectronics device structures

dc.typeOral presentation
dspace.entity.typePublication
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