Silicides for advanced CMOS devices

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Author(s)

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Chamirian, Oxana

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Kmieciak, Malgorzata

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Torregiani, Cristina

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Benedetti, Alessandro

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Richard, Olivier

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van Berkum, J.G.M.

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Veloso, Anabela

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Kottantharayil, Anil

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de Potter de ten Broeck, Muriel

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Metrics

1921 since deposited on 2021-10-16

Acq. date: 2025-10-23