Publication:
Zero-energy SIMS. Towards quantitative depth profiles with high depth and high spatial resolution
Date
| dc.contributor.author | Vanhove, Nico | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.contributor.thesisadvisor | Lievens, P. | |
| dc.date.accessioned | 2021-10-19T20:50:21Z | |
| dc.date.available | 2021-10-19T20:50:21Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20036 | |
| dc.title | Zero-energy SIMS. Towards quantitative depth profiles with high depth and high spatial resolution | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |