Publication:
Design method for the integration of DSA via patterning in sub-7 nm circuits
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1990 since deposited on 2021-10-23
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Acq. date: 2025-10-24
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Metrics
Views
1990 since deposited on 2021-10-23
431item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations