Publication:

Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

Date

2017
Journal article
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Author(s)

Zhang, Haodong
;
Chiappe, Daniele
;
Meersschaut, Johan  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Nuytten, Thomas  
;
Mannarino, Manuel  
;
Radu, Iuliana  
;
Vandervorst, Wilfried  
;
Delabie, Annelies  

Journal

Journal of Chemical Physics

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