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Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?

Date

2010
Proceedings Paper
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dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorCott, Daire
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-18T15:47:54Z
dc.date.available2021-10-18T15:47:54Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16944
dc.source.conferenceRusnanotech
dc.source.conferencedate1/11/2010
dc.source.conferencelocationMoscow Russia
dc.title

Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?

dc.typeProceedings paper
dspace.entity.typePublication
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