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Challenges and achievements for the electrical performance of MOSFETs with high-k dielectrics

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dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.date.accessioned2021-10-15T13:39:51Z
dc.date.available2021-10-15T13:39:51Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8984
dc.source.conferenceAnnual Workshop on Semiconductor Advances for Future Electronics (SAFE)
dc.source.conferencedate25/11/2004
dc.source.conferencelocationVeldhoven The Netherlands
dc.title

Challenges and achievements for the electrical performance of MOSFETs with high-k dielectrics

dc.typeProceedings paper
dspace.entity.typePublication
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