Publication:
Reliable two-dimensional carrier profiling by scanning spreading resistance microscopy on InP-based devices with fast quantification procedure
Date
| dc.contributor.author | Xu, Mingwei | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-15T00:05:28Z | |
| dc.date.available | 2021-10-15T00:05:28Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7069 | |
| dc.source.beginpage | 1048 | |
| dc.source.endpage | 1054 | |
| dc.source.issue | 2B | |
| dc.source.journal | Japanese Journal of Applied Physics. Part 1 | |
| dc.source.volume | 41 | |
| dc.title | Reliable two-dimensional carrier profiling by scanning spreading resistance microscopy on InP-based devices with fast quantification procedure | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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