Publication:

High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHeyns, Marc
dc.contributor.authorBellenger, Florence
dc.contributor.authorBrammertz, Guy
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorDelabie, Annelies
dc.contributor.authorEneman, Geert
dc.contributor.authorHoussa, Michel
dc.contributor.authorLin, Dennis
dc.contributor.authorMartens, Koen
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeuris, Marc
dc.contributor.authorMitard, Jerome
dc.contributor.authorPenaud, Julien
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorScarrozza, Marco
dc.contributor.authorSimoen, Eddy
dc.contributor.authorSioncke, Sonja
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorWang, Wei-E
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-17T22:54:25Z
dc.date.available2021-10-17T22:54:25Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15476
dc.source.beginpage51
dc.source.conferenceHigh Dielectric Constant Materials and Gate Stacks 7
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.source.endpage65
dc.title

High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
18650.pdf
Size:
748.95 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions