Publication:

Defect identification in bonding surface layer by positron annihilation spectroscopy

Date

2019
Proceedings Paper
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dc.contributor.authorInoue, Fumihiro
dc.contributor.authorPeng, Lan
dc.contributor.authorIacovo, Serena
dc.contributor.authorNagano, Fuya
dc.contributor.authorSleeckx, Erik
dc.contributor.authorBeyer, Gerald
dc.contributor.authorUedono, Akira
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorInoue, Fumihiro
dc.contributor.imecauthorPeng, Lan
dc.contributor.imecauthorIacovo, Serena
dc.contributor.imecauthorNagano, Fuya
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecPeng, Lan::0000-0003-1824-126X
dc.contributor.orcidimecIacovo, Serena::0000-0002-0826-9165
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-27T10:44:15Z
dc.date.available2021-10-27T10:44:15Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33195
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8735141
dc.source.conference2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2019)
dc.source.conferencedate21/05/2019
dc.source.conferencelocationKanazawa Japan
dc.title

Defect identification in bonding surface layer by positron annihilation spectroscopy

dc.typeProceedings paper
dspace.entity.typePublication
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