Publication:

Optimized diode analysis of electrical silicon substrate properties

Date

1998
Journal article
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dc.contributor.authorCzerwinski, A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorKlima, K.
dc.contributor.authorTomaszewski, D.
dc.contributor.authorGibki, J.
dc.contributor.authorKatcki, J.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-09-30T11:38:03Z
dc.date.available2021-09-30T11:38:03Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2471
dc.source.beginpage2107
dc.source.endpage2112
dc.source.issue6
dc.source.journalJournal of the Electrochemical Society
dc.source.volume145
dc.title

Optimized diode analysis of electrical silicon substrate properties

dc.typeJournal article
dspace.entity.typePublication
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