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High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Publication:
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Fukutome, H.
;
Alvarez, David
;
Vandervorst, Wilfried
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1885
since deposited on 2021-10-15
Acq. date: 2025-12-12
Citations
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Views
1885
since deposited on 2021-10-15
Acq. date: 2025-12-12
Citations