Publication:

A Statistical Approach for Evaluating the Spatial Distribution and Local Atomic Environment of Dopants Using Atom Probe Tomography

Date

2025
Journal article
https://doi.org/10.1093/mam/ozaf114
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dc.contributor.authorLin, Jhao-Rong
dc.contributor.authorMorris, Richard
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorPorret, Clément
dc.contributor.authorVantomme, Andre
dc.contributor.authorFleischmann, Claudia
dc.date.accessioned2026-01-27T09:27:13Z
dc.date.available2026-01-27T09:27:13Z
dc.date.createdwos2025-11-16
dc.date.issued2025
dc.description.wosFundingTextThe authors acknowledge the financial support by Research Foundation-Flanders (FWO) through Hercules projects ZW13_09 and AKUL 15-22 ZKD 1037 for the LEAP 5000 XR and Helios G3 CX, respectively.
dc.identifier.doi10.1093/mam/ozaf114
dc.identifier.issn1431-9276
dc.identifier.pmidMEDLINE:41222977
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58753
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherOXFORD UNIV PRESS
dc.source.beginpageozaf114
dc.source.issue6
dc.source.journalMICROSCOPY AND MICROANALYSIS
dc.source.numberofpages9
dc.source.volume31
dc.title

A Statistical Approach for Evaluating the Spatial Distribution and Local Atomic Environment of Dopants Using Atom Probe Tomography

dc.typeJournal article
dspace.entity.typePublication
imec.internal.crawledAt2025-11-20
imec.internal.sourcecrawler
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