Publication:

Tuned electrostatic probe for RF plasma diagnostics

Date

2013
Proceedings Paper
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dc.contributor.authorCirino, Giuseppe
dc.contributor.authorCastro, Raul
dc.contributor.authorPisani, Marcelo
dc.contributor.authorVerdonck, Patrick
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-21T06:59:27Z
dc.date.available2021-10-21T06:59:27Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22151
dc.identifier.urlhttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6676142
dc.source.beginpage1
dc.source.conferenceSymposium on Microelectronics Technology and Devices - SBMICRO
dc.source.conferencedate2/09/2013
dc.source.conferencelocationCuritiba Brazil
dc.source.endpage4
dc.title

Tuned electrostatic probe for RF plasma diagnostics

dc.typeProceedings paper
dspace.entity.typePublication
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