Publication:
A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab
Date
| dc.contributor.author | Van Hoornick, Nausikaa | |
| dc.contributor.author | Van den Broeck, Kristel | |
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Riedel, W. | |
| dc.contributor.author | Braun, C. | |
| dc.contributor.imecauthor | Van Hoornick, Nausikaa | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-15T17:04:42Z | |
| dc.date.available | 2021-10-15T17:04:42Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9760 | |
| dc.source.beginpage | 409 | |
| dc.source.conference | Proceedings of the International Symposium on Semiconductor Manufacturing - ISSM | |
| dc.source.conferencedate | 27/09/2004 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.source.endpage | 412 | |
| dc.title | A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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