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Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

Date

2008
Proceedings Paper
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dc.contributor.authorMarsik, Premysl
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVinokur, Klara
dc.contributor.authorCohen, Yoel
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T08:49:48Z
dc.date.available2021-10-17T08:49:48Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14126
dc.source.beginpage1079-N07-04
dc.source.conferenceMaterials and Processes for Advanced Interconnects for Microelectronics
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

dc.typeProceedings paper
dspace.entity.typePublication
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