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Towards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structures
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Towards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structures
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mody, Jay
;
Eyben, Pierre
;
Augendre, Emmanuel
;
Richard, Olivier
;
Arstila, Kai
;
Vandervorst, Wilfried
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1891
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1891
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations