Publication:

Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

Date

2007
Journal article
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Author(s)

Hardy, An  
;
Van Elshocht, Sven  
;
D'Haen, Jan  
;
Douheret, Olivier
;
De Gendt, Stefan  
;
Adelmann, Christoph  
;
Caymax, Matty  
;
Conard, Thierry  
;
Witters, Thomas  
;
Bender, Hugo  
;
Richard, Olivier  
;
Heyns, Marc  
;
D'Olieslaeger, Marc  
;
Van Bael, Marlies  
;
Mullens, J.

Journal

Journal of Materials Research

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1935 since deposited on 2021-10-16
Acq. date: 2026-01-11

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1935 since deposited on 2021-10-16
Acq. date: 2026-01-11

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