Publication:
Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si
Date
| dc.contributor.author | Takakura, K. | |
| dc.contributor.author | Ohyama, H. | |
| dc.contributor.author | Yoshida, T. | |
| dc.contributor.author | Murakawa, H. | |
| dc.contributor.author | Rafi, Joan Marc | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Ulyashin, A. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-15T06:55:49Z | |
| dc.date.available | 2021-10-15T06:55:49Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8204 | |
| dc.source.conference | Gettering and Defect Engineering in Semiconductor Technology - GADEST | |
| dc.source.conferencedate | 20/09/2003 | |
| dc.source.conferencelocation | Berlin Germany | |
| dc.title | Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |