Publication:
Composite particles for chemical-mechancial planarization applications
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T15:00:43Z | |
| dc.date.available | 2021-10-16T15:00:43Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11651 | |
| dc.title | Composite particles for chemical-mechancial planarization applications | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |