Publication:

ScCO2-based processes in semiconductor manufacturing: Why did it fail ?

Date

2008
Proceedings Paper
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dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorMalhouitre, Stephane
dc.date.accessioned2021-10-17T11:51:43Z
dc.date.available2021-10-17T11:51:43Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14650
dc.source.conference11th European Meeting on Supercritical Fluids - ISASF
dc.source.conferencedate4/05/2008
dc.source.conferencelocationBarcelona Spain
dc.title

ScCO2-based processes in semiconductor manufacturing: Why did it fail ?

dc.typeProceedings paper
dspace.entity.typePublication
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