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Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flash
Publication:
Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flash
Date
2014
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Breuil, Laurent
;
Blomme, Pieter
;
Tan, Chi Lim
;
Lisoni, Judit
;
Souriau, Laurent
;
Zahid, Mohammed
;
Richard, Olivier
;
Bender, Hugo
;
Van den Bosch, Geert
;
Van Houdt, Jan
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1877
since deposited on 2021-10-22
Acq. date: 2025-10-22
Citations
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Views
1877
since deposited on 2021-10-22
Acq. date: 2025-10-22
Citations