Publication:

Taming the Distribution of Light in Gate-All-Around Semiconductor Devices

Date

2024
Journal article
https://doi.org/10.1021/acs.nanolett.3c04033
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorNuytten, Thomas
dc.contributor.authorGawlik, Andrzej
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorOniki, Yusuke
dc.contributor.authorPuttarame Gowda, Pallavi
dc.contributor.authorMertens, Hans
dc.contributor.authorCharley, Anne-Laure
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorPuttarame Gowda, Pallavi
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecMertens, Hans::0000-0002-3392-6892
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecPuttarame Gowda, Pallavi::0009-0005-2886-5895
dc.date.accessioned2025-06-23T13:29:23Z
dc.date.available2024-02-11T17:06:52Z
dc.date.available2025-06-23T13:29:23Z
dc.date.issued2024
dc.identifier.doi10.1021/acs.nanolett.3c04033
dc.identifier.issn1530-6984
dc.identifier.pmidMEDLINE:38231178
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43534
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage1191
dc.source.endpage1196
dc.source.issue4
dc.source.journalNANO LETTERS
dc.source.numberofpages6
dc.source.volume24
dc.subject.keywordsAMORPHOUS SI
dc.subject.keywordsRAMAN
dc.subject.keywordsSTRESS
dc.subject.keywordsGE
dc.title

Taming the Distribution of Light in Gate-All-Around Semiconductor Devices

dc.typeJournal article
dspace.entity.typePublication
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